基于光學掃描法的導(dǎo)軌直線度測量方法

《基于光學掃描法的導(dǎo)軌直線度測量方法》由會員上傳分享，免費在線閱讀，更多相關(guān)內(nèi)容在學術(shù)論文-天天文庫。

1、摘要：基于多測頭光學掃描法對導(dǎo)軌直線度的在位測量方法，提出一種新的傾角補償?shù)娜郎y頭掃描方法。介紹了測量原理，推導(dǎo)了基于最小二乘法的直線度形狀重構(gòu)方法，重構(gòu)出的形狀可精確反映直線度誤差的高頻成分，且對測量噪聲有良好抑制能力。對算法進行了仿真驗證，并由實驗驗證了提出方法的有效性。實驗結(jié)果表明，該方法可以精確地還原出臺階狀的直線度形狀，測量標準偏差在10um以內(nèi)。關(guān)鍵詞：掃描測量；直線度；三測頭法；傾角補中圖分類號:TH711文獻標志碼:Adoi：10.3969/j.issn.10055630.2015.02.001Straightnessmeasuremento

2、fguiderailbasedonopticalscanningmethodFANGChuanming,CHENChangjun(SchoolofMechanicalandElectricEngineering,SoochowUniversity，Suzhou215006，China)Abstract：Anonlinemeasurementmethodofstraightnessisstudiedbasedonmultiprobeopticalscanningmethod.Athreeprobescanningmethodwithtiltcompensati

3、onisproposed.Reconstructedformcanaccuratelyexpressthehighfrequencyelementsofthestraightnesserror,andownsbettersuppressioncapabilityofthemeasurementnoise.Themeasurementprincipleoftheproposedmethodisintroducedfirstly.Theconstructionalgorithmofthestraightnesserrorsisdeducedbasedonthel

4、eastsquaresolutionandthecomputersimulationisperformed.Theexperimentalsystemisbuiltforverificatingthevalidityoftheproposedmethod.Theexperimentalresultsshowthattheproposedmethodcanaccuratelyreconstructthestraightnesserrorsofstepform,andthestandarddeviationislessthan10micrometer.Keywo

5、rds：scanningmeasurement；straightness；threeprobemethod；tiltcompensation引言直線度誤差是導(dǎo)軌加工件的主要形位誤差。對于運動平臺導(dǎo)軌，直線度誤差直接影響著機床、測量機的精度、穩(wěn)定性和壽命等［13］。為了測量導(dǎo)軌表面輪廓的直線度，常常采用掃描探頭法［4］。根據(jù)采用位移傳感器數(shù)量的不同，測量導(dǎo)軌直線度的探頭掃描scanningmethod.Athreeprobescanningmethodwithtiltcompensationisproposed.Reconstructedformcanaccu

6、ratelyexpressthehighfrequencyelementsofthestraightnesserror,andownsbettersuppressioncapabilityofthemeasurementnoise.Themeasurementprincipleoftheproposedmethodisintroducedfirstly.Theconstructionalgorithmofthestraightnesserrorsisdeducedbasedontheleastsquaresolutionandthecomputersimul

7、ationisperformed.Theexperimentalsystemisbuiltforverificatingthevalidityoftheproposedmethod.Theexperimentalresultsshowthattheproposedmethodcanaccuratelyreconstructthestraightnesserrorsofstepform,andthestandarddeviationislessthan10micrometer.Keywords：scanningmeasurement；straightness；

8、threeprobemethod；tiltcompe