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《半導(dǎo)體ge結(jié)技術(shù)分析與 ge橫向pin結(jié)光電探測器設(shè)計(jì)》由會(huì)員上傳分享，免費(fèi)在線閱讀，更多相關(guān)內(nèi)容在學(xué)術(shù)論文-天天文庫。
1、ContentChapter1Introduction?????????????????????????????????．．11．1Microdectronictechnique蚰dG毛MoSFETde、，i∞????????11．2R偽earchpm掣．essofmetaI／n一(kcontactstudy????????????l1．2．1Fenni．1evelp岫geff＆tati11terf-acesofmeta‰．Gecontacts???21．2．2hlterfacemodificationa11
2、dSBHmodulationofInetal／n-Gecontact?一31．3Res姐rchpmg比ss0fGeⅡ十pjuⅡctionstlldy??????????????81．3．1activationofndopantinGeaIldshallowjunc廿ontechnology?????81．3．2Gen十pjunctionbymetalillduceddopaIl_tac虹vation??????????91．4MainwOrks0fthisthesis?????????????????????
3、????????llRefbrenc俗??．??????????????????????????????????????．13Chapter2ModulationofSBHofWNI／GeSchottkyJunction???．．162．1Deposi廿onandpropertiesof、ⅣNx何m????????????????????．．162．1．1D印ositionmenlodsof、ⅣNxfihn??????????????????????162．1．2Resist鋤ce舳d)口良Dph嬲eofWN
4、x．．????????????182．1．3CheIllicalcompositionofWNx??????????????202．2SBHmeasurementsofWNI／GeScho州晦junc60n??????????．2l2．2．1FabricationofWNx／GeScho啪j岫曲on觚dI．Vcharacte血ation?2l2．2．2M0dels鋤dcalculationofSBHof、ⅣN，／Ge?????????????一232．2．3Mech鋤ismofSBHmo眥ationinWNx
5、／GeScb袖iunction??一262．3S眥mary???????????????????????????????????????27Refbrences????????．????????????????????????????????．28Chapter3Gen+pjunctiondiodesf．ormedbynickelinduceddopantactiVa廿onatlowtemperature????????????????????????????303．1D印osmonmethodsandthe
6、rmalstab謝鉀ofNiGemm????????303．1．1D印ositionofNiGemm????????????????????．303．1．2Th鋤alstabihtvofNiGe丘lm?????????????????。313．2Thefhbrica60nofGentpjuⅡc廿ondiodeandI．Vmeasurement?????343．2．1FabricationofGen十pjllIlcdondiode????????????343．2．2I．VcharacterizationofG
7、en十pjunctiondiode?????????～363．2．3Speci6ccontactresistivi移ofNiG“’．Ge?????????????383．2．4Mechallism鋤alysisofNimducedPac廿vationatlowtemperature?403．3SlImmary?????????????????????????????．42Refbr蚰ces????????????????????????????????????????．．44Chapter4Thestruct
8、raldesignandkeytechnologiesofnovelGephotodetectorwithlateralPINjunctionVII454．1StructI鼉ldesignofnoVelI[kphotodetectorwithIateralPINjunc60Ⅱ?．．454．1．1responsi、ri妙and3dBb鋤小vidmofGephotodetector???????．454
