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1、摘要片式電阻因其體積小、精度高、可靠性好等優(yōu)點(diǎn)被廣泛應(yīng)用于許多領(lǐng)域,有替代傳統(tǒng)電阻的趨勢(shì)。片式電阻是通過(guò)絲網(wǎng)將電阻材料印刷到電阻基片上的,其阻值通常具有不大于40%的制造誤差,一般采用激光調(diào)阻法對(duì)其阻值進(jìn)行修調(diào)。調(diào)阻精度是衡量激光調(diào)阻性能的重要技術(shù)指標(biāo),由于我國(guó)在激光調(diào)阻方面的研究起步較晚,與國(guó)外設(shè)備相比,國(guó)產(chǎn)激光調(diào)阻機(jī)的調(diào)阻精度有待進(jìn)一步提高。論文分析了影響激光調(diào)阻精度的因素,確定應(yīng)用優(yōu)化調(diào)阻控制策略的方法。實(shí)際數(shù)據(jù)表明,混合集成電路中采用的同一臺(tái)激光調(diào)阻設(shè)備按照同一種精度要求微調(diào)電阻阻值時(shí),實(shí)際調(diào)阻精度與被調(diào)電阻的阻值具有一定的相關(guān)性。提高調(diào)阻精度,而優(yōu)化調(diào)阻控制策略的前提是準(zhǔn)確掌
2、握激光調(diào)阻的阻值對(duì)調(diào)阻精度的影響,因此論文的研究?jī)?nèi)容為畢業(yè)設(shè)計(jì)的任務(wù)是基于數(shù)理統(tǒng)計(jì)原理,結(jié)合數(shù)值模擬方法,確定相關(guān)關(guān)系的定量表達(dá)式,并結(jié)合實(shí)測(cè)數(shù)據(jù)進(jìn)行分析驗(yàn)證。關(guān)鍵詞:激光調(diào)阻調(diào)阻精度線性擬合ABSTRACTForsmallvolume,highprecisionandwellreliability,thechipresistorshavebeenusedinmanyfields.Andthereisatrendthatthechipresistorwillfillinthetraditionalresistor.Resistormaterialisprintedonchipresis
3、torsusingsilkscreen.Sotheyhavethemanufactureerrorthatislessthan40%.Generally,usinglasertrimmingtoadjuststheresistanceofchipresistorsaccurately.Trimmingprecisionisanimportanttechniqueitemforlasertrimming.Thestudyoftrimmingprecisionisn’twelldoneinourcountry.Comparetoothercountry,thetrimmingprecisi
4、onofLaserTrimmingSystemmadeinourcountryneedtobeimproved.Firstly,thethesisanalyzestheitemsthataffectthetrimmingprecision.Anddeterminestoimprovethetrimmingprecisionbyoptimizingcontrolstrategyoflasertrimming.Theactualdata?showthatthe?hybridintegratedcircuit?using?the?same?laser?trimmingequipment?to
5、?fine-tune?the?requirements?in?accordance?with?thesame?precision?resistor,theactual?transfer?resistance?precision?resistor?wastransferred?to?the?correlation.Improve?the?accuracy?of?trimming,while?optimizing?thepremise?of?the?trimming?controlstrategy?isthe?accurateknowledgeof?theresistance?of?the
6、?lasertrimming?reversedresistance?accuracyof?the?thesis?for?the?graduatedesign?tasks?based?on?mathematicalstatisticaltheory?andnumericalsimulation?methods?todeterminethe?the?correlationbetween?quantitative?expression,combinedwith?themeasureddata?foranalysisvalidation.KeyWords:LasertrimmingTrimmi
7、ng?precisionLinearfit目錄目錄第一章緒論11.1引言11.2激光調(diào)阻51.3激光調(diào)阻系統(tǒng)及修調(diào)技術(shù)機(jī)理61.4切割圖形71.5激光調(diào)阻機(jī)7第二章線性擬合的基本原理8第二章MATLAB的應(yīng)用93.1matlab產(chǎn)生隨機(jī)數(shù)123.2線性擬合和線性回歸123.3擬合優(yōu)度與檢驗(yàn)14第四章實(shí)驗(yàn)原理194.1實(shí)驗(yàn)?zāi)康?94.2試驗(yàn)分析204.3試驗(yàn)步驟21第五章實(shí)驗(yàn)過(guò)程215.1試驗(yàn)數(shù)據(jù)的獲得215.2線性擬合過(guò)程255.3拐點(diǎn)計(jì)算與結(jié)