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《銅線鍵合界面特性與規(guī)律分析》由會員上傳分享，免費在線閱讀，更多相關(guān)內(nèi)容在行業(yè)資料-天天文庫。
1、中自太學(xué)碩±學(xué)＆*立ABSTRACTWiththecopperwirebondingasthemainobjectinthepaper，TheinterracialmicrostructuresoftheCu-wirebondingtoanAIpadisobserved，thecompositionofthebondinginterfacecompoundsisdetermined，hebondinginterfacecompoundformationmechanismisanalyzed，andtherelationshipbetweenthecopper
2、bondingprocessbondingtemperature，bondingultrasonicenergy，chipaluminumthicknessandthebondingstrengthisexploredBesidesthereisalargeimpactonchipcantileverbondingprocessinthecopperwirebondingprocess，andthedynamiccharacteristicsofalargereboundandlowintensityofthecopperwirebondingpointTo
3、solvethisprobIem，289mthicknessofthealuminumchipsisproposedinsteadof109rnthicknessofthealuminumchipTheresearchworkincludesthefollowingsections：Firstly，HRTEMtestresultsshowthatuntilthecopperkeyco—temperaturerisesto340。CbeforethecompoundsgeneratedbetweenCu—AIinterfacebondinginterface；
4、X-raydiffractionanalysisshowedthattheCu—AIinterfacetogenerateCuAl2，Cu9A14；AfterCu—AIinterfacecompoundisgenerated，thebondingstrengthandbondingsuccessrateissgnificandvenhancedSecondly，therelationshipbetweenthebondingtemperature，theevolutionofultrasonicenergy，thealuminumtbicknessandbo
5、ndstrength：asthebondingtemperatureincreasedto340。C，thedimpleareaofthebondinginterfaceismoreobvious，morefullybonded，thebondingstrengthhigher；appropriateultrasoundenergy(5mW)ultrasoundenergyisconducivetotheformationofcopperwirebondingstrength，whiletOOlOWortoohighcanleadtocopperwirebo
6、ndingstrength；bondingchipstocoverthe289mthickaluminumfilmcaneffectivelyreducethehardnessvalueofthechiptoimprovethebondingsmoothtoensurethatthecopperwirebondingmorefullytoenhancethequalityofcopperwirebondingThirdlycopperwirebondingprocessf研chipcantileverhasalargeimpact，thedynamiccha
7、racteristicsofthebigreboundandlowintensity中南大學(xué)碩士學(xué)位論文ofthecopperwirebondingpoint，comparethedynamiccharacteristicsofthealuminumfilmthicknessofthechip289mand10umaluminumthicknessofthechipandbondingstrength，theresultsshow：thedynamiccharacteristicsoftheformerismorestable，morepronouncedd
8、impleareamorefullybonded，a
