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1、上海交通大學碩士學位論文AbstractCRYSTALLIZATIONANDTEXTURECHARACTERISTICSOFCOBALT-SILICONTHINFILMSPUTTEREDBYALLOYTARGETABSTRACTThetargetmaterialsofCoSi2alloywasdesignedandprepared,andthefilmsystemwasdepositedbyusingthemagnetronsputteringmethod.Testingresultsshownt
2、hat,theelementsdistributehomogeneouslyinfilm,andsimilartothetargetmaterials.ThecrystallizationandphasetransformationofamorphousCoSi2thinfilmswereinvestigatedbyinsituX-raydiffraction,differentialscanningcalorimeter,EDXAandScanningElectronMicroscope.The
3、resultshownthatthesputteredCoSi2filmswereamorphousfilm,CoSiphaseformedfirstly,astemperatureincreasingthefilmchangetobeCoSi2finally.ThroughcalculationwegotGibbsfreeenergy-compositioncurve,fromwhichwecanfindoutthechangeofGibbsfreeenergyaccordingtodiffer
4、entfilmcomposition.Usethecommontangentlineprinciple,thecurvewasdividedintothreeregions,TheGibbsfreeenergy-compositioncurvesupportthatamorphousphasehadlowerGibbsfreeenergyatCoSi2.Crystallizationtemperatureofcobaltandsiliconalloyfilmatdifferentcompositi
5、onwasstudied,therearemainlythreedifferentmechanismsatdifferentcomposition:theyareMIC,minusenthalpyanddiffusion.Fromthesecalculationsandanalyses,wegaveoutcleardepictionofcrystallization.Thefilm’stexturecharacterwasstudied,asimpleexpressionmethodofthewi
6、retexturewasestablished,andthefilmtexturewasmeasuredquantitatively.ThroughthedeductionoftheimprovedKnuyt’smodelandtheeffectsofthesizeoftheoriginalgrain,wesuccessfullyexplainedwhythe(111)texturegrowwithaprivilege;explainedtheeffectsofthesputteringparam
7、etersontexture:sputteringpowerandpressurewereinlinearrelationshipwiththe(111)texture,Ifthesputteringpowerraise,theII上海交通大學碩士學位論文Abstract(111)textureofcrystalfilmincreased;withthepressurereducing,thefilmtextureincreased;Withthesubstratetemperaturerisin
8、g,thefilmtextureincreasedatinitial,uptothemaximumthendecreased.Keywords:Magnetronsputtering,silicide,film,crystallization,textureIII上海交通大學學位論文原創(chuàng)性聲明本人鄭重聲明所呈交的學位論文是本人在導師的指導下獨立進行研究工作所取得的成果除文中已經(jīng)注明引用的內(nèi)容外本論文不包含任何其他個人或集體已經(jīng)發(fā)表或撰寫過的作品成果對本文的研究做出重要貢獻的個人和集
