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1、上海交通大學(xué)碩士學(xué)位論文柔性神經(jīng)微電極的制備與微加工工藝研究姓名：李博申請學(xué)位級別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：惠春20070101上海交通大學(xué)碩士學(xué)位論文基底厚度均勻，致密性好，且性能穩(wěn)定。在柔性神經(jīng)微電極的制備過程中，整體工藝流程的設(shè)計和掩模層材料的選擇是比較關(guān)鍵的步驟。通過采用金屬鋁作掩模，最終制備出柔性神經(jīng)微電極，并采用電化學(xué)分析的方法搭建了測試系統(tǒng)。測試結(jié)果顯示，在一定的頻率范圍內(nèi)45（10Hz～10Hz），該微電極阻抗值低（1000Ω～400Ω），相位延遲?。?20度左右
2、），說明實驗加工出的柔性神經(jīng)微電極性能良好。在此基礎(chǔ)上，還探討了視網(wǎng)膜修復(fù)的三維神經(jīng)微電極。關(guān)鍵詞：柔性神經(jīng)微電極，視網(wǎng)膜修復(fù)，聚對二甲苯，微細(xì)加工II上海交通大學(xué)碩士學(xué)位論文THEFABRICATIONOFFLEXIBLENEUROLMICROELECTRODESANDRESEARCHINGONMICROMACHININGPROCESSABSTRACTNeuralmicroelectrode,whichisalsocalledbiologicelectronicalinterface,isth
3、estructureofelectrodesinwhichthesignaltransmitsbetweenelectronandlivecellularorganizing.Theexternalsignalofcellcanberecordedpassivelythroughelectriclivecellularorganizingbymicroelectrodeorwecanstimulatethecellsbyelectricsignal.Itbelongstothecrossedre
4、gionofbiomedicineengineeringscienceandmicro-electromechanicalsystems(MEMS).Aimingatthesuffererswhohaveretinitispigmentation(RP)oragerelatedmaculardegeneration(ARMD)diseasesintheworld,weresearchonfabricatingmicroelectrodearraysontheflexiblefoundationo
5、fParyleneinordertomaketheeyesinblindnessorbeinginblindnessobtainpartialeyesightoveragainbyreplacingpartfunctionofretina.Thinkingabouttheorganicstructureofhuman’seyes,biologiccompatibilityandlong-termstabilizationofneuralmicroelectrodesandIII上海交通大學(xué)碩士學(xué)
6、位論文themethodwhichadoptsthemethodofembeddingartificialbodyinthefrontofretina;wedesignthestructureofflexibleneuralmicroelectrodesasfollows.ThedimensionofParylenefoundationis3200μm×1000μm×8μm.ThediameterandthicknessofTi/Ptelectrodesis200μmand10nm/300nmr
7、espectively.Therearesixteenelectrodesbetweenwhichthespaceis200μm.Thedown-leadismadebymaterialofPtorAuandthewidthis50μm.Inordertoplayafunctionofinsulating,wedepositalayerofParyleneandexposuretheportionofmicroelectrodesanddown-leadinterface.Atthesameti
8、me,wealsoimprovethebiologiccompatibilityandlong-termstabilization.TheprocessflowingisdesignedaccordingtothestructureofmicroelectrodeandwefabricateParylenefoundationthroughCVD.Theresultshowsthatthethicknessoffoundationisuniformandcompact.Intheprocesso
