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1、IEEETRANSACTIONSONINSTRUMENTATIONANDMEASUREMENT,VOL.47,NO.4,AUGUST1998907CurrentDensityDistributionMeasurementofNegativePoint-to-PlaneCoronaDischargeMohammadR.Madani,Member,IEEE,andTobyA.MillerAbstractDThecurrentdensitydistributionontheplateelec-eachprobeis?ushwi
2、ththesurfaceoftheplateandpolishedtrodeofapoint-to-planecoronadischargeismeasuredwithasmooth.Eachprobeistestedbymeasuringthecurrentthroughcomputer-controlledmeasuringsystem.Themeasurementsaretheprobewhileplacingtheprobeinaprecisepositionbelowtakenbyrotatingtheplat
3、ewhichconsistofbuilt-inarraystheneedleelectrodeduringthecoronadischarge.Duringtheoforthogonalprobes.Thecurrent-densitydistributioncanbemeasuredfordifferentseparationdistancesbetweenthepointactualmeasurementofthecurrentdensity,apicoammeteriselectrodeandtheplaneele
4、ctrodewhiletheappliedhighvoltagemultiplexedinserieswiththefreeendofeachprobe,whilecanbevariedfromthevoltagerequiredfortheonsetofcoronatherestoftheprobesareconnectedtotheplaneelectrode.dischargeto30kV.Thecurrent-densitydistributionofasingleItisassumedthattheoveral
5、lcurrent-densitydistributionwillneedleissymmetricarounditscenterpointwithintheaccuracyofthemeasurementsystem.However,thecurrent-densitydistribu-notchangeduringmeasurements,sincethetypicalmeasuredtionisradiallynonuniform.Thecomputer-controlledmeasuringcurrentthrou
6、gheachprobeisintherangeof10Awhilesystemiscapableofmeasuringthecurrentdistributionofsingletheoverallplaneelectrodecurrentisintherangeof10A.pointandmultipointelectrodes.ThearrangementoftheprobesisshowninFig.1.IndexTermsDCAMAC(ComputerAutomatedMeasurementTheplaneele
7、ctrodeisa17.78cm17.78cm1.27andControl),corona,currentdensity,oxidation,ozone,plasma,cmcopperplate.Theprobeswithdesignatednumbers0,2,semiconductormaterials,silicon.4,6,8,10,12,14,and16are0.5cmapartfromeachotherinonedirection,whileprobesdesignatedwithnumbersI.INTRO
8、DUCTION1,3,5,7,9,11,13,15,and17are0.5cmapartfromeachotherinaperpendiculardirection.Thecenter-to-centerORONAdischargehasapplicationinanalyticalinstru-distancebe
