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1、Abbreviation??FullName????中文說明HVAC????????CUB????CentralUtilityBuilding??中央動力廠房GEX????GeneralEXhaust????普通及熱排氣SEX????ScrubberEXhaust????酸排氣VEX????VolatileorgaiccompoundEXhaust????有機(jī)溶劑排氣AEX????AmmoniaEXhaust????堿性排氣PCW????PlantCoolingWater????工藝?yán)鋮s水PV????ProcessVacuum????工藝真空HV????Ho
2、useVacuum????真空吸塵CW????CityWater????自來水FMCS???FailityMonitoringControSystem????廠務(wù)監(jiān)控系統(tǒng)MCC????MotorControlCenter????馬達(dá)控制中心VFD????VariableFrequencyDevice??變頻器CCTV???CloseCircuitTelevsion????閉路電視PA????PublicAdresssystem????廣播系統(tǒng)FA????FireAlarm??system????火災(zāi)報警系統(tǒng)UPW????UltraPureWater????超
3、純水FWW????FluorideWasteWater????低濃度氫氟酸廢水IWW????IndustryWasteWater????工業(yè)廢水OWW???OrganicWasteWater????有機(jī)溶劑廢水DAHW??DrainAmonia??Hydride?Waste?含氨廢水RCL????Recyclewater????制程回收循環(huán)水RCM????Reclaimwater????制程回收再利用水HFW????HighFluorideWastewater????高濃度氫氟酸廢水BGW????BackgridingWastewater????晶背研磨廢水
4、SAW????SulfuricAcidWastewater??硫酸廢液PAW????PhosphoricAcidWastewater????磷酸廢液SW????StripperWastewater????剝離液廢液TW????ThinnerWastewater????清洗廢液PIX????Pixwastewater????PIX廢液SLOW???Oxideslurrywastewater????介電質(zhì)研磨廢水SLWP????Metalslurrywastewater????金屬研磨廢水SLWP????Polyslurrywastewater????多晶硅研磨
5、廢水PN2????ProcessN2??制程用氮氣GN2????GeneralN2????一般用氮氣CDA????Compressor?DryAir??壓縮干燥空氣VMB????ValveManifoldBox????閥箱空調(diào)系統(tǒng)????????AHU????AirHandlingUnit????空調(diào)箱MAU????Make-up??AirUnit????外氣空調(diào)箱VAV????VariableAirVolume??box??可變風(fēng)量風(fēng)箱FFU????FanFilterUnit????風(fēng)車過濾器HEPA????HighEfficiencyParticulat
6、eFilter????高效率過濾器ULPA????UltraLowPenetrationFilter????超高效率過濾器A/S????Air??Shower????空氣浴塵室CUS???CentralUtilityBuilding???中央動力廠房電力系統(tǒng)????????FMCS????FailityMonitoringControlSystem????廠務(wù)監(jiān)控系統(tǒng)MCC????MotorControlCenter????馬達(dá)控制中心VFD????VariableFrequencyDevice????變頻器CCTV????CloseCircuitTelev
7、sion????閉路電視SCADA????Supervisory??ControlAndDataAcquisition????監(jiān)視控制和數(shù)據(jù)搜集系統(tǒng)MCC????MotorControl??Center????馬達(dá)控制中心VFD????VariableFrequencyDevice????變頻器水處理系統(tǒng)????????UPW????UltraPureWater????超純水RO????ReverseOsmosis????逆滲透膜TOC????TotalOrganicCarbon????總有機(jī)碳MB????MixedBed????混床UF????UltraF
8、iltration????超濾SC????Stron