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1、SEMIE15-0698N/A?SEMI1990,1998SPECIFICATIONFORTOOLLOADPORT1Purpose5.1.3cassettecentroid?AdatumrepresentingthetheoreticalcenterofastackofwafersinacassetteThisstandardisintendedtounifytheinterfaceformedbythepocketcenterlineandthe"center"betweenprocess/inspectiontoolsandautomated
2、waferpocketasdefinedbythelocationassociatedwithcarriertransportsystemswhilemaintainingcompati-dividingdimensionB3bytwo(seeSEMIE1,Figurebilitywithhumantransport.1).2Scope5.1.4cassetteenvelope?Arectangularvolumewithverticalsideswhichcompletelycontainsacassette,ThisspeciTcationd
3、ealswiththemechanicalinterfaceevenifthecassetteistilted(seeFigure1).(loadport)forwafercarriertransferbetweenwafercarriermaterialtransportsystems,includinghumans,5.1.5enclosedloadport?Aloadportwithoverheadandwaferfabrication/inspectionequipment(tools).clearanceobstructedbythet
4、ool.TheconceptdeTnestheplacementandorientationofa5.1.6globalorientation?Thegeneralorientationofwafercarrieronatooltoallowreasonableinterfacingawafercarrierinatool;maybeverticalorhorizontal.withmechanizedmaterialmovementsystemswithoutcompromisinghumanaccesstoperformthematerial
5、5.1.7loaddepth?Thehorizontaldistancefromtheexchangefunction.loadfaceplanetocassettecentroidorcarriercentroid(seeFigures2and3(D)).3Impact5.1.8loadfaceplane?ThefurthestphysicalverticalCompliancewiththisspeciTcationrequirestheplace-boundaryplanefromcassettecentroidorcarriercen-m
6、entofloadportsontoolstospeciTcheights,orienta-troidontheside(orsides)ofthetoolwhereloadingoftions,andloaddepths.Restrictionsarealsoplacedonthetoolisintended(seeFigures2and3).clearancestoobstructionswhichmaybeadjacentto5.1.9loadheight?Thedistancefromthebottomofsuchports.thecas
7、setteorcarriertothefloorattheloadfaceplane(seeFigure3(H)).4ReferencedDocuments4.1SEMIDocuments5.1.10loadport?Theinterfacelocationonatoolwherewafercarriersaredelivered.ItispossiblethatSEMIE1?Specificationfor3inch,100mm,125wafersarenotremovedfrom,orinsertedinto,thecar-mm,and150
8、mmPlasticandMetalWaferCarriersrieratthislocation.SEMIE1.7?Standardfo
