The Search of Earthquake Early Warning and Vibration Picking Device Based on MEMS

The Search of Earthquake Early Warning and Vibration Picking Device Based on MEMS

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時(shí)間:2017-07-17

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1、研究生課程考核試卷科目:專業(yè)外語(yǔ)教師:姓名:學(xué)號(hào):20140802054專業(yè):微電子學(xué)與固體電子學(xué)類別:學(xué)術(shù)上課時(shí)間:2014年10月至2014年12月考生成績(jī):卷面成績(jī)平時(shí)成績(jī)課程綜合成績(jī)閱卷評(píng)語(yǔ):閱卷教師(簽名)TheSearchofEarthquakeEarlyWarningandVibrationPickingDeviceBasedonMEMSLaibaoYu,ZhigaoChen,XiongweiWu,HanLv(KeyLaboratoryofEarthquakeGeodesy,InstituteofSeismology,CEA,Wuhan430071)(

2、WuhanBaseofInstituteofCrustalDynamics,CEA,Wuhan430071)Abstract:AsetofearthquakeearlywarningandvibrationpickingdevicebasedontheMEMStechnologywasdesigned.ThedevicewastestedbyusingGSK-166vibrationtableandcomparedwithstandardsensorAC43throughthemetrologicalverification,andthe?resultsshowed

3、thattheperformanceparametersofthedevice?meettherequirementsofearthquakeearlywarningsystembasically.KeyWords:MEMStechnology,earthquakeearlywarning,vibrationpickingdevice1IntroductionPhysicsoftheearthisasciencebasedonobservationandmeasurement,seismologyhasarapiddevelopmentsincetheinstrum

4、enthaveemergedandthemethodbasedontheinstrumentobservationwasestablished.Afterthedevelopmentofseveralgenerations,seismometerhavedevelopedfromtherecordbymagnifyingsmokeusinginitialmechanicallevertomeasurementIntegratedelectronictechnologyandcomputertechnology,improvedthefrequencybandrang

5、eanddetectingprecisionsubstantially,anditmaketheseismologicalresearchanddevelopmententeranewstage.Withtheresearchanddevelopmenttoseismologyscienceandrequirementofspacedetectiontothemoonandthemars,combiningwithdevelopmentofthemodernelectronicandcomputertechnology,modernseismicsensorsnee

6、dtodeveloptowardslowpowerconsumption,miniaturization,chip,lowcostandhighreliability,andbeabletogetfullbandobservationandmeasurement.Modernmeasurementinstrumentbasedonmechanicalhammerhavesomeadvantagessuchashighlowresolution,largedynamicrange,butshowthedeficienciesintheapplication.Micro

7、ElectronicMechanicalSystemisbasedontheintegratedcircuittechnologyandmicromechanicalprocess,andthenintegratethemechanicalcomponents,opticalsystem,drivercomponents,electroniccontrolsystemasawholeunit,hassmallvolume,lightweight,smallconsumption,lowcost,easytointegrateandstrongoverloadca

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