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《The Search of Earthquake Early Warning and Vibration Picking Device Based on MEMS》由會員上傳分享，免費在線閱讀，更多相關(guān)內(nèi)容在學(xué)術(shù)論文-天天文庫。
1、研究生課程考核試卷科目：專業(yè)外語教師：姓名：學(xué)號：20140802054專業(yè)：微電子學(xué)與固體電子學(xué)類別：學(xué)術(shù)上課時間:2014年10月至2014年12月考生成績：卷面成績平時成績課程綜合成績閱卷評語：閱卷教師(簽名)TheSearchofEarthquakeEarlyWarningandVibrationPickingDeviceBasedonMEMSLaibaoYu,ZhigaoChen,XiongweiWu,HanLv(KeyLaboratoryofEarthquakeGeodesy,InstituteofSeismology,CEA,Wuhan430071)(
2、WuhanBaseofInstituteofCrustalDynamics,CEA,Wuhan430071)Abstract:AsetofearthquakeearlywarningandvibrationpickingdevicebasedontheMEMStechnologywasdesigned.ThedevicewastestedbyusingGSK-166vibrationtableandcomparedwithstandardsensorAC43throughthemetrologicalverification,andthe?resultsshowed
3、thattheperformanceparametersofthedevice?meettherequirementsofearthquakeearlywarningsystembasically.KeyWords:MEMStechnology,earthquakeearlywarning,vibrationpickingdevice1IntroductionPhysicsoftheearthisasciencebasedonobservationandmeasurement,seismologyhasarapiddevelopmentsincetheinstrum
4、enthaveemergedandthemethodbasedontheinstrumentobservationwasestablished.Afterthedevelopmentofseveralgenerations,seismometerhavedevelopedfromtherecordbymagnifyingsmokeusinginitialmechanicallevertomeasurementIntegratedelectronictechnologyandcomputertechnology,improvedthefrequencybandrang
5、eanddetectingprecisionsubstantially,anditmaketheseismologicalresearchanddevelopmententeranewstage.Withtheresearchanddevelopmenttoseismologyscienceandrequirementofspacedetectiontothemoonandthemars,combiningwithdevelopmentofthemodernelectronicandcomputertechnology,modernseismicsensorsnee
6、dtodeveloptowardslowpowerconsumption,miniaturization,chip,lowcostandhighreliability,andbeabletogetfullbandobservationandmeasurement.Modernmeasurementinstrumentbasedonmechanicalhammerhavesomeadvantagessuchashighlowresolution,largedynamicrange,butshowthedeficienciesintheapplication.Micro
7、ElectronicMechanicalSystemisbasedontheintegratedcircuittechnologyandmicromechanicalprocess,andthenintegratethemechanicalcomponents,opticalsystem,drivercomponents,electroniccontrolsystemasawholeunit,hassmallvolume,lightweight,smallconsumption,lowcost,easytointegrateandstrongoverloadca
