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1、2012-07-1T9h#e#R#es#ea#r#ch#o#f#F#lo#w#S#e2ns0o1r2Ba-s0ed7-on1A9p#p#li#ca#ti#on#2#0of#1A2u-to0m7o-b1ile9########YUBo2lin1,2,3,GANZhi2yin1,33,LUOXiao2bing3,4,CAOHui1,3,XUJing2ping21.InstituteofMicrosystems,HuazhongUniversityofScienceandTechnology,Wuha
2、n430074,China;2.DepartmentofElectronicScienceandTechnology,HuazhongUniversityofScienceandTechnology,WuhanChina;3.WuhanNationalLabofOptoelectronics,HuazhongUniversityofScience&Technology,Wuhan430074,China;4.SchoolofEnergyandPowerEngineering,HuazhongUn
3、iversityofScience&Technology,Wuhan430074,ChinaAbstract:Thethermalfilmflowsensorhasbeenresearched.Themembraneismadeofmulti2filmwithhighmechanicalrobustnessandlowcrossdirectionthermalconductivity.Thetemperaturedistributionofmem2branehasbeensimulated;th
4、evariationoftemperatureonmembranehasbeenanalyzedatdifferentflowrate.Bycomparingtheresultsofexperimentwiththeresultsofsimulation,aconformingconclusionisob2tained:atlowflowrate,thefallingoftemperatureinupstreambycooleffectisremarkable,thetempera2turein
5、downstreamincreasesslightly,andthetemperaturedifferencebetweenupstreamanddownstreamisnotable.Withtheflowrateincreasing,thetemperatureinupstreamdistancereachessaturation,andbe2causethereisawholecooleffectonthechipathighflowrate,thetemperatureindownstr
6、eamdistancebe2ginstodecreaseslightly.Therefore,theflowmeasuringrangeobtainedbytemperaturevariationofdis2tancemeasuringresistorissmall.Twopairsofmeasuringresistorsareplacedinupstreamanddownstreamrespectively,whichenhancesthemeasuringprecisionandwidens
7、measuringrange.Comparingwithsingleoutputvoltagevalue,thesuperpositionvalueishighalot.Thepeakvalueofsinglevoltagesignalreaches15.7mV,whereas,thepeakvalueofsuperpositionvoltagecanreach28.6mV.Meanwhile,measuringrangehasbeenbroadened.Keywords:flowsensor;
8、multi2film;temperaturesimulation;calorimetrictypeEEACC:7230;7320W應(yīng)用于汽車的流量傳感器研究余柏林1,2,3,甘志銀1,33,羅小兵3,4,曹蕙1,3,徐靜平21.華中科技大學微系統(tǒng)研究中心,武漢430074;2.華中科技大學電子學與技術(shù)系,武漢430074;3.華中科技大學武漢光電國家實驗室,武漢430074;4.華中科技大學能源與動力工程學院,武漢430074摘要:研究了橫膈膜式熱膜流量傳感器,橫膈膜采用多層薄膜結(jié)構(gòu),增加其機械
