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1、2012-07-麗滟欄湖糊醐翻桝2^Tenl側(cè)稱(chēng)湘相攤蜘卿耐€...■YUBoilin'丄3，GANZhi2yin1，33，LUOXiao2binf，CAOHui13,XVJin^ping11.InstituteofMicrosysterns,HuazhongUniversityofScienceandTechnology,Wuhan430074,China;2.DepartmentofElectronicScienceandTechnology，HuazhongUniversityofScienceandTechnology，WuhanChina:3.Wuh
2、anNationalLabofOptoelectronics9HuazhongUniversityofScience&Technology，Wuhan430074,China;、4.SchoolofEnergyandPowerEngineeringfHuazhongUniversityofScience&Technology，Wuhan430074.ChinaAbstract:Thethermalfilmflowsensorhasbeenresearched.Themembraneismadeofmulti2filmwithhighmechanicalrobu
3、stnessandlowcrossdirectionthermalconductivity.Thetemperaturedistributionofmem2branehasbeensimulated;thevariationoftemperatureonmembranehasbeenanalyzedatdifferentflowrate.Bycomparingtheresultsofexperimentwiththeresultsofsimulation，aconformingconclusionisob2tained:atlowflowrate，thefal
4、lingoftemperatureinupstreambycooleffectisremarkable，thetempera!tureindownstreamincreasesslightly，andthetemperaturedifferencebetweenupstreamanddownstreamisnotable.Withtheflowrateincreasing，thetemperatureinupstreamdistancereachessaturation，andbe2causethereisawholecooleffectonthechipat
5、highflowrate，thetemperatureindownstreamdistancebe2ginstodecreaseslightly.Therefore，theflowmeasuringrangeobtainedbytemperaturevariationofdis2tancemeasuringresistorissmall.Twopairsofmeasuringresistorsareplacedinupstreamanddownstreamrespectively，whichenhancesthemeasuringprecisionandwid
6、ensmeasuringrange.Comparingwithsingleoutputvoltagevalue，thesuperpositionvalueishighalot.Thepeakvalueofsinglevoltagesignalreaches15.7mV，whereas,thepeakvalueofsuperpositionvoltagecanreach28.6mVMeanwhile,measuringrangehasbeenbroadened.Keywords:flowsensor;multi2film;temperaturesimulati
7、on;calorimetrictypeEEACC:7230;7320W應(yīng)用于汽車(chē)的流量傳感器研究余柏林1’2’3，甘志銀1’33，羅小兵3’4，曹蕙13，徐靜平21.華中科技大學(xué)微系統(tǒng)研究中心，武漢430074;2.華中科技大學(xué)電子學(xué)與技術(shù)系，武漢430074?3.華中科技大學(xué)武漢光電國(guó)家實(shí)驗(yàn)室，武漢430074;4.華中科技大學(xué)能源與動(dòng)力工程學(xué)院，武漢430074摘要:研究了橫膈膜式熱膜流量傳感器，橫膈膜采用多層薄膜結(jié)構(gòu)，增加其機(jī)械強(qiáng)度，同時(shí)保持其較低的橫向熱導(dǎo)率。模似了橫膈膜上溫度的分布，分析了在不同流速下各點(diǎn)的溫度變化。通過(guò)實(shí)驗(yàn)和理論模似，得到了比較一致
8、的結(jié)論：在低流a下，上游的冷卻作用使溫
