資源描述：
《通過調(diào)相式載波消除外差干涉儀的非線性》由會員上傳分享，免費在線閱讀，更多相關內(nèi)容在工程資料-天天文庫。
1、通過調(diào)相式載波消除外差干涉儀的非線性SergeDubovitsky,OliverP.Lay,andDavidJ.SeidelJetPropulsionLaboratory,M/S301-451,4800OakGroveDrive,Pasadena,California91109ReceivedOctober8,2001Accuracyinmeasuringdisplacementinopticalinterferometersislimitedbycyclicerrorsintroducedbyvariousleakagepaths
2、withinthesystem.Existingtechniquestoreducethisnonlinearitydonotworkwhenthereislargeopticallossinthetargetpath,suchasforlong-rangemeasurements.Wedescribeanewapproachtoreducingnonlinearitythatovercomestheselimitations.Basedonphasemodulationofthelaserlight,andrequiringmin
3、imaladditionalcomponents,experimentshavedemonstratedrejectionoftheeffectsofleakageinthepresenceoflargeopticalloss.?2002OpticalSocietyofAmerica光學干涉儀測量位移的精確度受限于循環(huán)誤差所引入的各種系統(tǒng)內(nèi)泄漏路徑（leakagepaths）?，F(xiàn)有的技術來減少這種非線性在目標路徑有大量光損耗如遠程測量時不可行。我們描述了一種新的方式來減少非線性,克服這些局限性。基于相位調(diào)制的激光,并要求最少組件,實
4、驗已證明拒絕泄漏影響的大量光損耗的存在。2002年美國?光學學會OCIScodes:120.3940,120.3180,120.5060.Opticalinterferometryisamethodofchoiceformeasurementsofsubmicrometerdisplacements.光學干涉是對亞微米級位移測量的一種選擇方法。Mostpracticalinterferometersusedforprecisionsensingarebasedontheheterodyneinterferometer,owingto
5、itshigh-precisionreadoutaffordedbyheterodynesignalprocessing.最實用的干涉儀用于精密感應是基于外差干涉儀,由于自身的高精度讀出所給予的外差信號處理。However,atypicalopticalheterodyneinterferometerislimitedinitsresolutionbyparasiticleakageofopticalsignals,calledpolarizationleakageorpolarizationmixing,whichresultsi
6、nundesiredself-interferenceheterodynebeatsatthephotodetector.1–3然而，一個典型的光學外差干涉儀受限于它的分辨率通過無源泄漏的光信號，被稱為極化泄漏或極化混合，結(jié)果是不期望的自干涉外差跳動在光電探測器上。Self-interference(SI)causesacyclicnonlinearityintheinterferometer’sphase-versus-displacementresponse.自干涉導致循環(huán)在干涉儀的phaseversus-displacemen
7、t非線性響應。ThemagnitudeoftheerrorisproportionaltotheratiooftheSIleveltothedesiredrange-relatedsignal.誤差的大小是成正比的比值自干涉水平所需的range-related信號。Typicallythisratioisoftheorderofafewpercentandresultsinarangenonlinearityerrorofafewnanometers.通常這個比例為百分之幾和結(jié)果在一系列幾納米的非線性誤差。Anumberofmeth
8、odsforcalibratingthenonlinearityandimprovingresolutiontothesubnanometerlevelhavebeenproposed.已經(jīng)計劃使用一些方法來校正非線性和改善亞納米級的
