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1、密級公開分類號TG7工程碩士學位論文單晶藍寶石基片集群磁流變拋光實驗研究陳剛指導教師肖強教授靳龍平高級工程師申請學位級別工程碩士工程領域機械工程2018年5月1日0.8nm。4）分析了亞表面損傷的形成機理，理論分析了集群磁流變拋光去除亞表面損傷的可行性，基于印壓斷裂理論，建立了亞表面損傷深度與拋光參數(shù)的關系模型，通過正交實驗驗證了模型的合理性以及研究了拋光參數(shù)對亞表面損傷深度的影響規(guī)律，實驗結果表明，亞表面損傷深度隨著拋光壓力和磨粒粒徑的增大而增大，拋光壓力是決定是否產(chǎn)生亞表面損傷的關鍵因素，當磨粒粒徑為280
2、nm，拋光壓力為82N時，拋光過程中不產(chǎn)生亞表面損傷，并且能夠去除研磨中造成的亞表面損傷，經(jīng)過100min拋光亞表面損傷深度減小至0.9nm。關鍵詞：單晶藍寶石；集群磁流變拋光；材料去除量；表面粗糙度；亞表面損傷深度theproblemsexistingintheexperiment.Thelappingfluidformulationsandthepolishingfluidformulationswereimproved.Theclustermagnetorheologicalpolishingproces
3、swascarriedoutbyusingself-madesilicondioxidecolloidalsolwithaparticlesizeof70nm.Theeffectsoftheconcentrationofthepolishingfluid,thepHofthepolishingfluidandthetemperatureofthepolishingfluidonthesurfaceroughnesswerestudied.Theexperimentalresultsshowthattherate
4、ofdecreaseofsurfaceroughnessdecreaseswiththedecreaseofabrasiveconcentration,increasesfirstandthendecreaseswiththeincreaseofthepolishingfluidtemperatureandpH.Whentheconcentrationofthepolishingfluidis45%,pH=11,temperatureat36℃,therateofdecreaseofsurfaceroughne
5、ssis1.65nm/minandthesurfaceroughnessis0.8nm.4)Theformationmechanismofsubsurfacedamagewasanalyzed.Thefeasibilityofclustermagnetorheologicalpolishingtoremovesubsurfacedamagewastheoreticallyanalyzed.Basedonthetheoryofimprintfracture,therelationshipmodelbetweens
6、ubsurfacedamagedepthandpolishingparameterswasestablished.Therationalityofthemodelwasverifiedbyorthogonalexperimentsandtheeffectsofpolishingparametersonthedepthofsubsurfacedamagewasstudied.Theexperimentalresultsshowthatthesubsurfacedamagedepthincreaseswiththe
7、increaseofpolishingpressureandparticlesize.polishingpressureisakeyfactorindeterminingwhethersubsurfacedamageisoccurring,whentheparticlesizeis280nmandthepolishingpressureis82N,nosubsurfacedamageoccursduringpolishingandthesubsurfacedamagecausedbygrindingcanber
8、emoved.After100minutespolishing,thesubsurfacedamagedepthisreducedto0.9nm.KeyWords:singlecrystalsapphire;clustermagnetorheologicalpolishing;materialremovalamount;surfaceroughness;subsurfacedamage
