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1、DEVELOPMENTANDAPPLICATIONOFMICROFLUORIDEGLASSETCHINGTECHNOLOGYABSTRACTWedesigntheformulaofmicrofluorideglassetchingliquidbvstudvprincipleofhydrofluoricacidetchingtechniqueanddetermineoptimalratiobvsinglelactorexperimentandorthogonaltest．Next，wedeterminetheoptim
2、umprocessconditionsofmicrofluorideglassetching，thetimeshowtheexperimentresultandevaluatetheeffectofmicrofluorineacidetchingtechniaue．Applicationofmicrofluorideglassetchingtechniqueisbasedonthedevelopmentofmicrofluorideglassetchingtechniqueandtheresultofmicr0ele
3、ctronicscreenresearching．Weanalyzedthepossiblefactorsinfluencingtheetchingeffectanddeterminetheoptimalconditions．UndertheoDtimalconditions，wedoapplicationexperiment，showandevaluatethee鼠ct．Conclusiontheexperimentasfollow：(1)Basicontheglasssurfacestructure，surfac
4、epropertiesandmetbod．wediscussedthemechanismofmicrofluorineetchingtechniqueandthinkthemicrofluorinetechniqueisfeasible．(2)Therelationshipsoftraditionalformulaofetchingliquidandsurfacemorphologywithetching，determinantofsurfacepropertyafteretchedwerestudied，themi
5、crofluorineetchingliquidcomponents：ammoniumfluoride．a(chǎn)mmoniumsulfate，oxalicacid，waterandsodiumbicarbonatewasdetermined．(3)Theformulaofmicrofluorineetchingliquidwasoptimizedbysin91eIactorexperimentsandorthogonaltest，formulaofmicrofluorineetchingliqudwasobtained：a
6、mmoniumfluoride：ammoniumsulfate：oxalicacid：sodiumbicarbonate：water4．5：2：8．5：4．5：70．(4)lnthebasicofoptimizedformulationandsinglefactorexperiment．theoptlmumprocessconditionswasobtained：pH=5．5，temperature48。C，etchingtiIlle2．2h。111(5)Intheconditionsofoptimalformula
7、andprocess，microfluorineetchingexperimentwascarriedoutandtheeffectofetchingwasinvestigatedbySEM，IR，bendingandtransmissiontest．Theresultshowedthatevenness，smoothness，hardness，ofglasssurfacehadimprovedthanbefore．(6)Thefactorsthatmayaffectetchingeffectofthemobilep
8、honeglasspanelandtheoptimalprocessconditionwereanalysed．TheresultsshowedthattheoptimumprocessconditionswaspH=4．5，temperature50℃，etchingtime2．2h．(7)Themicrofluorideglassetchi
