Chemical reactions in the detection of acetone and NO by a CeO2 thin film

Chemical reactions in the detection of acetone and NO by a CeO2 thin film

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1、SensorsandActuatorsB71(2000)36±41ChemicalreactionsinthedetectionofacetoneandNObyaCeO2thin?lma,*aabR.Bene,I.V.Perczel,F.Re?ti,F.A.Meyer,bbM.Fleisher,H.MeixneraDepartmentofAtomicPhysics,TUBudapest,Budafokiu?t8,1111Budapest,HungarybSiemensCorporateResearch&Development,

2、Otto-Hahn-Ring6,81739Munich,GermanyAccepted22June2000AbstractThisworkpresentsanattempttoapplytheundopedn-typesemiconductorCeO2inthedetectionofgasesDacetoneandNODinanoxygencontainingenvironment.However,insuchgasmixturechemicalreactionsmaytakeplaceatandnearthehotsenso

3、rsurface,changingthecompositionofthegasenvironment.TheeffectofCeO2DitscatalyticactivityDwasstudiedintheoxidationofacetoneandNOduringtheirdetection.Forthispurpose,aparticularexperimentalset-upwasplannedandbuilt:aspecial,ˉowtypequartzmicroreactorconnectedtoamassspectr

4、ometer,offeringthepossibilityforsimultaneousresistancemeasurementandanalysisofthenearsensorgascomposition.Thesensorwasoperatedbothinself-andoven-heatedmodebetween20±9008C.ThemaximumsensitivityofCeO2wasfoundbetween350±4508Cforbothgases.Whileacetonecausesawellmeasurab

5、leresistancechange,thesignalduetoNOisquitesmall.TheCeO2surfaceprovedtobecatalyticallyactiveintheoxidationofacetoneresultingintheformationofCO2.Surprisingly,thesamesurfaceledtothereductionofNO.#2000ElsevierScienceB.V.Allrightsreserved.Keywords:CeO2oxidesemiconductor;

6、Gassensor;Acetone;NO1.Introductionphasechangingitslocalcomposition.Asthesensorsingeneralaresmallandspeciallydesigneddevices,theirOxidesemiconductorbasedsensorshavebeencommer-catalyticactivityisdif?culttobestudied.ciallyavailableformanyyears.Accordingtomarketneeds,Fo

7、rthispurpose,aspecialdeviceisneeded:aninstrumentastablesensormaterialworkingathightemperatureisthatcombinesthepossibilitiestomeasurethesensorresis-desirableforchemicalorvehicleindustry.tanceandtoanalysewithhighaccuracythecompositionofCericoxideisann-typesemiconducto

8、r[1];itisaquitethenearsurfacegasregion.Inthiswork,suchanequipmentnewsensormaterialandseemsto?ttheaboverequirements.ofourdevelopment[4]wass

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