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1、廣東工業(yè)大學(xué)碩士學(xué)位論文實驗,取得了預(yù)期效果,同時驗證了該裝備具有很高的精度和穩(wěn)定性。關(guān)鍵詞:微細電火花,反拷塊,線電極放電磨削,伺服控制系統(tǒng)lIAbstractMicroIfabricationhaswideapplicationinmanyareasofprecisionmolds,aerospace,precisioninStruments,bio.medicaletc.Therearemanydevelopedmicrofabricationmethods.such弱micro.EDM,microelectrochemi
2、calmachining,microultrasonicmachining,etc.whichrequiretheuseofmicro.electrodetoachievetheprocessingofthemicro.structure.Forexample,theprocessingoftheaxisoftheelectrodewithasimpleshapeoffineporousslotandtinythree.dimensionalcavity,usingthearrayoftinyelectrodesonthegro
3、upofholesandcomplexcavityprocessing.Inordertoensurethescaleandprecisionofthemicrofabrication,ithascorrespondingrequirementsontheuseofthet001electrodesize,shape,positionaccuracyandsurfacequality.Inaddition,itisalsocriticaltominimizetheadverseeffectsofthetoolelectrodep
4、ositionaccuracyofthemicro.machining,SOyouneedonline,andpreparetoavoidtheduplicationoftheelectrodeduetothesecondfixturepositioningerrorsandfixtureerrors.PrecisionmanufIact耐ngmethodstoproduceadiameterassmallasafewmicronsofthemicro.electrode,suchasturning,milling,grindi
5、ngmethod,LIGA,buttheygenerallyCannotachieveonlinepreparationtoolelectrode,whichmakesitdifficulttomatchfoiloW.upfineprocess.Whethermicro—electrodecallbeachievedonlinepreparationornothasbecomethepremiseofmanymicrofabricationmethodsandoneofthekeys-Therefore,ithasfar.rea
6、chingsignificancetoindependentlydevelopadedicatedmicro..toolelectrodepreparationdevice.FinelineelectrodepreparationmethodsincludeBEDG(blockelectrodedischargegrinding)method,WEDG(wireelectrodedischargegrinding)method,electrochemicalcorrosion,EEDG(edgeelectrodeEDMgrind
7、ingmethod)act,whichareEDMmethods·Throughthetoolelectrodepreparationtechniquesarereviewed,andthendeterminethecombinationofWEDGandBEDGastheprogram.TheDaperdiscussedthedevelopmentofmicro—toolelectrodepreparationdeviceinIII廣東工業(yè)大學(xué)碩士學(xué)位論文detail,includingturntablediameter700
8、mm,precisiondisplacementunits,granitecountertopsandcolumns,onthebasisoftheseoverallstructuraldesign,micro-electrodedesignofprocessi