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1、1.CompanyOverviewAug2007HQ:526Chobu-Ri,Mohyun-Myeon,Yong-In,KoreaFactory:???????????(??????)AddressSemiconductorTechnologyDevelopment,andServicesLim,HeechoulHQTel:+82313392970;Fax:+82313392972FactoryTel:+82626059566PSSandLEDProductionEquipmentfirstar0802@hotmail
2、.comTypeofBusinessEstablishmentCEOMajorProductsContactE-mailFirstarPhotonCo.,LtdCompanyName1www.firstarphoton.comHomepage:MOCVD(2”x6ea)2.Factory??23.ProductsPSS3TypicalSize:2”,3”,4”PSS(PatternedSapphireSubstrate)forEpiGrowth2inch,3inch,4inchAvailableWaferSizeEqu
3、ipmentStepper,Tracksystem,ICP-RIE,Wetbath5,000pcs/monthCapacityHeight:1.3μm~1.9μmBottom:1.8μm~3.8μmPatternSize430μm~900μmAvailableWaferThickWithin:≤2%,WtoW:≤3%UniformityChina,Japan,USACurrentSales4.PSSproductionoverview45.ProcessofPSSproduction5SapphireSubstrate
4、SapphireSubstratePhotoresistThicknessReticleUVlightSapphireSubstratePlasmaEtchingDevelopPhotoExposure1.Photo-resistcoating2.Stepping&Exposure3.Developingexposedpatterns4.DryetchingbyICP-RIE6.PSSEquipments6SteppersystemTracksystemICP-RIEWetbathMeasurement7.PSSPat
5、ternList7ProductCodePatterns[μm]EtchingDepth[μm]Bottomsize[μm]SEMImageD0B4x1.22.13.87C0D3x22.03.3B5C2.5x1.51.93.0B8B2.8x1.21.883.26B0A2x11.562.42A5A1.5x11.331.8478.PSSPatternImageProductD0B(4x1pattern)88.PSSPatternImageProductB5C(2.5x1.5pattern)98.PSSPatternImag
6、eProductB8B(2.8x1.2pattern)108.PSSPatternImageProductB0A(2x1pattern)118.PSSPatternImageProductA5A(1.5x1pattern)129.InspectionStandardA,B,Cgrade13GradeRoundFlatzoneScratchCommentAEdge~2mm:don’tcareEdge~4mm:don’tcareNoscratchBEdge~2mm:don’tcareEdge~4mm:don’tcare1p
7、ointscratchLength≤2mmCEdge~2mm:don’tcareEdge~4mm:don’tcareOver1pointscratchLength>2mmPatternshapeDifferentbycustomerneedsDefaultStandard-Depth:1.7~1.9um-Bottomsize:2.8~3.1umRoundEdge~2mmNoscratchFlatzone:Edge~4mmAgradeEdge~2mmEdge~4mm1pointscratch≤2mmBgradeEdge~
8、2mmEdge~4mmOver1pointscratch>2mmCgrade10.ProcessofPSSproductionD1.9014Chipsize:24mil10.PSSShape&LEDChipCharacteristicD1.8415Chipsize:24mil10.PSSShapeandLEDChipCharact
