資源描述：
《SEMI E25-92 (Reapproved 0699) CLUSTER TOOL MODULE INTERFACE》由會員上傳分享，免費在線閱讀，更多相關內(nèi)容在行業(yè)資料-天天文庫。
1、SEMIE25-92(Reapproved0699)CLUSTERTOOLMODULEINTERFACE:MODULEACCESSGUIDELINEThisguidelinewastechnicallyreapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.CurrenteditionreapprovedbytheNorthAm
2、ericanRegionalStandardsCommitteeonFebruary28,1999.PostedtoSEMIOnLineApril1999;tobepublishedJune1999.Originallypublishedin1992.Minoreditorialchangesweremadetothisdocumenttoconformtoeditorialguidelines.SEMIE21;thus,atransportmodulepossessesmultiple1Introductioninboardplanes.Theo
3、utboardsurfaceisparalleltothe1.1Scope—Thisguidelinespecifiesanenvelopeinterfaceplaneandnormallycoincideswiththatpartofwithinwhichaclustertoolmoduleissituated.Entrythemodulewhichisfarthestfromtheinterfaceplane.andexitlocationsthroughtheenvelopeandconnectionEachsideofthemoduleen
4、velopeconsistsofseverallocationstothemoduleforutilitiesandfacilityservicesverticalplanes.Thebottomsurfacegenerallycoincidesarerecommended.withthefloor,andthetopisahorizontalplanethatcon-tainsthehighestpointofthemodule.1.2Purpose—Thepurposeoftheclustertoolmoduleaccessguidelinei
5、stoprovideassistanceintheplace-3.3Inthesectionsthatfollow,thedistinctionbetweenmentofutilitiesandfacilityservicestoclustertoolthephysicalmoduleandthespacereservedforthemodulesinordertoimproveaccessformaintenancemodulewithintheenvelopemustbekeptinmind.Sec-andserviceandtosimplif
6、yclustertoolinstallation.tion4referstowhereutilitylinespenetratetheenve-lope,andSection5referstoconstraintsonwherethese1.3Impact—Thisguidelinerecommendsthatequip-linesconnecttothephysicalmodule.mentdesignslimittheplacementofutilitylinesandfacilityservicestospecificportionsofth
7、emodule4AllocationofModuleEnvelopeSurfacesenvelope.4.1Theallocationofsurfacesissubjecttotheneedfor1.4Exceptions—Localsafetyregulationsmustaccesstotheinterfaceplane,modulemovement,main-alwaystakeprecedenceoverthisguideline.Localtenanceaccessspace,andprotectionofmodulecompo-cond
8、itionsmayjustifyexceptionstothisguideline.nents(particularlye
