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1、SEMIE22-0697N/A?SEMI1991,1997CLUSTERTOOLMODULEINTERFACE:TRANSPORTMODULEENDEFFECTOREXCLUSIONVOLUMESTANDARD1Introduction3.6transportmoduleendeffector?Thatpartofthetransportmodulethatsupportsthewaferandcan1.1Scope?Thestandarddescribesthevolumeextendbeyondtheinterf
2、aceplane(definedinSEMIwithinanyprocessorcassettemodulewhichshallbeE21).accessibletothetransportmoduleendeffectorinaclustertool.Thestandardislimitedtomoduleswhich3.7wafersupportplatform?Aslot,pedestal,orsetaccommodatewafersizesfrom100mmuptoandofpinsusedtoholdawa
3、ferinahorizontalattitude.including200mmindiameter.3.8wafertransportaxis?Thecenterlineoftrans-1.2Purpose?Thepurposeofthestandardistopro-portmoduleendeffectormotion.Thiscenterlineisvidesufficientdetailtoallowthetransportmoduleendsymmetricwiththewafertransportzone
4、asdescribedeffectortomovewaferstoandfromprocessandcas-inSEMIE21.settemodulesinaclustertoolwithoutmechanical3.9wafertransportposition?Alocationwithinainterference.processorcassettemodulewherethewaferisaccepted1.3Impact?Theadoptionofthestandardrequiresorpresented
5、bythetransportmoduleendeffector.Thisequipmentdesignerstoallowspecificunobstructedisalsothelocationofthewafercentroid.volumeswithinprocessandcassettemodulesforwafertransportandplacesrestrictionsonthedesignofthe4Requirementstransportmoduleendeffector.Somerestrict
6、ionsare4.1WaferTransport?Thewaferistobetransporteddependentonthewafersize.inahorizontalattitude(seeApplicationNoteA.1).2ApplicableDocuments4.2WaferTransportPlaneExclusionZone?TheexclusionzoneisillustratedinFigure1,andthevari-2.1SEMIDocumentsablesaredefinedinTab
7、le1andspecifiedinTable2SEMIE1?Specificationfor3inch,100mm,125mm,(seeApplicationNoteA.2).TheclearareasbetweenBand150mmPlasticandMetalWaferCarriersandCandalongthewafertransportaxisarespecifiedtoallowthetransportmoduleendeffectortobeSEMIE21?ClusterToolModuleInterf
8、ace:Mechan-retractedafterthewaferhasbeenplacedonthesupporticalInterfaceandWaferTransportStandardplatformintheprocessorcassettemodule.Theright-hatched(////)areadenotestheexcl
