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1、SEMIE22.1-1296N/A?SEMI1992,1996CLUSTERTOOLMODULEINTERFACE300mm:TRANSPORTMODULEENDEFFECTOREXCLUSIONVOLUMESTANDARD1IntroductionThestandardprovidestherequirementstochangethelimitsofapplicabilityofSEMIE22from100mmto200mmdiameterwafersto300mmdiameterwafers.2ApplicableDocuments2.1SEMIStandardsSEMIE1.9—Pro
2、visionalMechanicalSpecificationforCassettesUsedtoTransportandStore300-mmWafersSEMIE22—ClusterToolModuleInterface:TransportModuleEndEffectorExclusionVolumeStandard3Requirements3.1WaferTransportPlaneExclusionZone—AllfixeddimensionsremainthesameasforSEMIE22withthefollowingexception.The25mmand10mmdimeni
3、onsfortherectangularspaceexcludedfromthefrontofthePaddleExclusionZoneareexpandedanddefinedbyVariablesIandHrespectively.Thesevari-ablesareshowninFigure1.Variablesfor250mmand300mmdiameterwafersarespecifiedinTable1.Table1.WaferTransportPlaneExclusionZoneDimensionsfor250mmand300mmDiameterWafersWaferSize
4、Variables250mm(10in.nom.)300mm(12in.nom.)A270mm(10.63in.)320mm(12.60in.)B215mm(8.46in.)250mm(9.84in.)C130mm(5.12in.)225mm(8.86in.)D122mm(4.80in.)147mm(5.79in.)E135mm(5.31in.)160mm(6.30in.)F145mm(5.71in.)170mm(6.69in.)G122mm(4.80in.)147mm(5.79in.)H75mm(2.95in.)154mm(6.06in.)I117mm(4.61in.)1SEMIE22.1-
5、1296?SEMI1992,1996ForkExclusionZonePaddleExclusionZoneGIDEWaferTransportAxis10(.39)HCBAWaferTransportPositionTransportModuleFPedestalorPinExclusionZoneFigure1NewWaferTransportPlaneExclusionZoneDimensionsSEMIE22.1-1296?SEMI1992,199623.2VerticalPlaneExclusionZone—ThiszoneisillustratedinFigure2,whichde
6、finesdimensionalvalues.Figure2Proposed300mmVerticalPlaneExclusionZone(ElevationView)3SEMIE22.1-1296?SEMI1992,1996NOTICE:Thesestandardsdonotpurporttoaddresssafetyissues,ifany,associatedwiththeiruse.Itistheresponsibilityoftheuserofthesestandardstoestablishappropriatesafetyandhealthpracticesanddetermin
7、etheapplicabilityofregulatorylimitationspriortouse.SEMImakesnowarrantiesorrepresentationsastothesuitabilityofthestandardssetforthhereinforanypar-ticularapplication.Thedeterminationofthesuitabilityofth
