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1、SEMIE20-0697N/A?SEMI1991,1997CLUSTERTOOLMODULEINTERFACE:ELECTRICALPOWERANDEMERGENCYOFFSTANDARD1Introductionoperationofassociatedequipmentandwillshutoffallpotentialhazardsoutsidethemainpowerenclosure.1.1Scope?Thestandarddealswiththedeliveryandemergencyinterruptionofelectricalpowertothemod-
2、3.3EMOinterface?Thelocationatwhichaprocessulesofaclustertool.orcassettemoduleEMOcableisconnectedintotheclustertoolcircuit.1.2Purpose?ThepurposeofthestandardistospecifytheEmergencyOffcapabilitytothemodules4Requirementsofaclustertool;toallowmoduleEmergencyOffdis-connectandreconnectinasafema
3、nnerwithout4.1PowerDistributionremovingpowerfromtherestofthetool;andtopre-4.1.1Mains?Eachclustertool(asdefinedinSEMIventpowerfrombeingappliedtoamodulewhenitsE21)shallhaveitspowerprovidedbyoneormoreEmergencyOffisnon-functional.contactorsenabledbytheEMO.Thepoweristobe1.3Impact?Thestandardre
4、quiresthatpowercandeliveredtooneormorepowerdistributionenclo-bedeliveredtoanindividualmoduleonlyifitsEmer-sures,wherevoltagetransformationmaytakeplacegencyOffisfunctional.Thisdoesnotprecludebeforedistributiontothemodule(asdefinedinSEMIremovalofpowerfromthemodulebynon-emergencyE21).means.4
5、.1.2ModulePowerDistribution?Thepowerdis-ThestandardspeciTestheEmergencyOffcircuitfunc-tributiontoeachmoduleisprovidedthroughadedi-tionsthatmustbeprovidedattheEmergencyOffinter-catedcircuitbreakerinthepowerdistributionfacesofaclustertool,includingtheplug,momentaryenclosure.Theratedcurrenta
6、ndvoltageineachcircuitbypassswitchandbypassjumperplug.Pinoutsfortheisdeterminedbythetoolconfiguration.AdiscussionEmergencyOffplugandbypassjumperplugarespeci-ofhowthisstandardmaybeimplementedisgiveninTed.ApplicationNoteA.1.4.1.3OperationoftheEMO?Activationofthe2ApplicableDocumentsandRefere
7、ncesEMOshallnotcauseorallowanunsafeconditionto2.1SEMIDocumentsexist(seeApplicationNoteA.2).SEMIE21?ClusterToolModuleInterface:Mechan-4.2EMOCircuiticalInterfaceandWaferTransportStandard4.2.1Description?Eachmoduleattachedtothe2.2MilitaryStandards1clustertoolistohaveat
